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Deposición en vacío

HEX series- Deposition system

Serie HEX - Sistema de deposición

Sistemas de deposición HEX
The HEX system from Korvus Technology is a highly modular bench-top coater for vacuum deposition using PVD techniques. It is easy to change the deposition technique by exchanging panels.
Visit the Korvus Technology site for more detailed information.
El sistema HEX de Korvus Technology es un sistema modular de sobremesa para la deposición al vacío utilizando técnicas PVD. Es fácil cambiar la técnica de deposición mediante el intercambio de los paneles.
Visita el sitio web de Korvus Technology para obtener información más detallada.
IntroductionIntroducción
IntroductionIntroducción
The HEX system from Korvus Technology is a highly modular bench-top coater for vacuum deposition using PVD techniques. It is easy to change the deposition technique by exchanging panels.
El sistema HEX de Korvus Technology es un sistema modular de sobremesa para la deposición al vacío utilizando técnicas PVD. Es fácil cambiar la técnica de deposición mediante el intercambio de los paneles.
Configurations
- E-beam evaporation
- Sputter deposition
- Thermal evaporation
- Organic material deposition
Configuraciones
- Evaporación por haz de electrones
- Pulverización catódica (sputtering)
- Evaporación térmica
- Deposición de material orgánico
Applications
- Sample preparation for surface analysis
- Research and development
- Teaching and training
Applications
- Preparación de muestras
- I+D
- Enseñanza y formación
Sistemas de deposición - serie HEX
Vacuum chamber
Cámara de vacío
Vacuum chamber
Cámara de vacío
The HEX platform offers an un-matched level of user control and customization, designed to incorporate the latest thin film technologies and performance into a bench top platform. It can be operated both manually and automatically with a huge range of sources and system options. Its modularity and ease of use make it the ideal tool for clean rooms and training programs.
The HEX has been developed with the student training in mind. Its modular construction allows various key elements to be exposed and discussed and interacted with, enabling student laboratories to fully explore the mechanical, material and growth elements of thin film research and nanomaterials.
The HEX's ability to be quickly reconfigured at low additional expense allows it to provide easy training on a reproducible and recognizable platform for various deposition/coating techniques ranging from sample preparation for surface analysis to e-beam, sputtering, thermal and a range of other thin film deposition techniques.
La plataforma HEX ofrece un nivel inalcanzable de control y personalización del usuario, diseñado para incorporar las últimas tecnologías de películas finas y buen rendimiento en una plataforma de mesa de trabajo. Puede funcionar de forma manual o automática, con una gran variedad de fuentes y opciones sistemáticas. Su modularidad y uso fácil hacen que sea la herramienta ideal para lugares limpios y programas de formación.
El HEX ha sido desarrollado pensando en la mente de un estudiante. Su construcción modular permite la exposición, discusión e interacción con varios componentes clave, lo cual conduce a la exploración de nanomateriales, investigación de películas y demás en laboratorios de estudiantes.
La facilidad de reconfiguración de HEX, y su coste económico, contribuyen a que sea ideal para aportar formación fácil en cuanto a técnicas de deposición y recubrimiento, de las cuales hay una gran variedad, mencionadas anteriormente.
Sample handling
Manipulación
Sample handling
Manipulación de las muestras
Choosing the correct sample stage for a process is as important as choosing the correct deposition method. The features of the stage can affect the uniformity, the morphology and the resulting film composition.
STATIC
The HEX base system is shipped with a static sample stage which can accommodate heated sample stagesamples up to 4″ in diameter, with the larger HEX-L model capable of taking samples of up to 6″. Included with the stage are sample holders for 4″ or 6″ samples and for multiple smaller samples. All sample stages can be equipped with either a manual or a motor-driven shutter and feature a convenient set of mounting posts on the system to allow the stage to be securely mounted when replacing samples without needing to clear room on desks or workbenches.
ROTATING & HEATING
The stage may be upgraded to one which incorporates sample rotation and heating. The rotation (0, 2-20rpm as standard) improves the film uniformity dramatically and is recommended for samples with dimensions greater than 15mm and/or where good uniformity is important. The stage has options for heating to 300oC or 500oC which will result in improved film morphology for some materials.
COOLING
The HEX range of deposition systems can also be equipped with a water-cooled sample stage, this reduces unwanted temperature-rise in sensitive samples such as during the coating stage in lift-off processes.
Choosing the correct sample stage for a process is as important as choosing the correct deposition method. The features of the stage can affect the uniformity, the morphology and the resulting film composition.
STATIC
The HEX base system is shipped with a static sample stage which can accommodate heated sample stagesamples up to 4″ in diameter, with the larger HEX-L model capable of taking samples of up to 6″. Included with the stage are sample holders for 4″ or 6″ samples and for multiple smaller samples. All sample stages can be equipped with either a manual or a motor-driven shutter and feature a convenient set of mounting posts on the system to allow the stage to be securely mounted when replacing samples without needing to clear room on desks or workbenches.
ROTATING & HEATING
The stage may be upgraded to one which incorporates sample rotation and heating. The rotation (0, 2-20rpm as standard) improves the film uniformity dramatically and is recommended for samples with dimensions greater than 15mm and/or where good uniformity is important. The stage has options for heating to 300oC or 500oC which will result in improved film morphology for some materials.
COOLING
The HEX range of deposition systems can also be equipped with a water-cooled sample stage, this reduces unwanted temperature-rise in sensitive samples such as during the coating stage in lift-off processes.
Sources
Fuentes
Sources
Fuentes
FISSION sputter source
Sputtering sources (FISSION)
The HEX system is designed to be an effective sputtering system for deposition of a wide range of thin films. We offer sputtering sources with 1" and 2" diameter targets. The sputter sources are equipped with SmCo magnets and accept targets with thickness ranging from 1 to 6 mm. The typical target usage is around 43% for non-magnetic materials.

TAU e-beam source
E-beam evaporators (TAU)
We offer low-dose, high accuracy mini e-beam evaporators with 1 or 4 pockets,

Thermal Boat Source source for HEX system
Thermal Evaporation Source (TES)
The TES sources are available as either single-source per flange or as a two-source unit. Optionally, thermocouples may be mounted to monitor the boat temperature. Each source can be equipped with a manual or automatic shutter.

ORCA Source source for HEX system
Organic evaporator (ORCA)
The ORCA low-temperature evaporation source employs active cooling of the crucible to ensure that the heating process is balanced by a strong opposing cooling process which results in excellent temperature stability and control.
Sputter source for HEX system
Fuentes de pulverización catódica (FISSION)
El sistema HEX está diseñado para ser un sistema efectivo de pulverización catódica para la deposición de una amplia gama de películas finas.Ofrecemos fuentes de pulverización catódica con dianas de 1” o 2” de diámetro. Las fuentes están equipadas con imanes SmCo y aceptan dianas de grosor variable de 1 a 6 mm. Las dianas no-magnéticas se suelen usar un 43%.

E-beam source for HEX system
Evaporadores E-beam (TAU)
Ofrecemos evaporadores mini e-beam con bajo dosis y alta precisión.

Thermal Boat Source source for HEX system
Fuentes de barcas termales (TES)
El TES incluye una sola fuente de barca termal, lo cual permite la integración de un gran rango de barcas termales y filamentos. La fuente es simple operativamente, y aporta evaporación eficiente y económica.

Organic source for HEX system
Evaporador orgánica (ORCA)
La fuente de evaporación a baja temperatura ORCA emplea refrigeración activa del crisol para garantizar que el proceso de calentamiento se equilibra por un fuerte proceso de enfriamiento de oposición que se traduce en una excelente estabilidad y control de temperatura.
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